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DRY SCRUBBERS

CALLISTO DRY BED SCRUBBERS – CHANGING THE GAME IN HAZARDOUS GAS ABATEMENT

If an abatement system would abate the target gas to below PEL or TLV ratings, wouldn’t use any water or fuel to achieve its abatement, and would be simple to use with minimal maintenance, it would be considered a “game-changer” from how we currently abate hazardous gases. It truly would be “the better way”. How about if this abatement system also used a hazardous gas monitor to measure the level of hazardous gas emitted from the scrubber and even provided a log of its efficiency as proof of its effectiveness? The Callisto platform does all this and more. Over the past 20 years, hundreds of users worldwide have discovered that there is a better way when it comes to abatement, and they have chosen Callisto.

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FEATURES:

  • Systems to abate from 40 slpm to over 700 slpm total exhaust

  • Dry bed chemisorption to convert hazardous gas species into non-reversible inorganic solids

  • No Water or Fuel Needed

  • Sub-PEL/TLV Efficiencies – Guaranteed!

  • Minimal maintenance required

  • Operates at room temperature

  • Controls the flow of gas through the canister at optimal abatement pressures

  • Advances PLC/HMI control with continuous non-volatile data logging

  • Communication capacity via MODBUS, BACnet and Profinet

  • Suitable for MOCVD, etch, implant, deposition and other demanding processes that use hazardous production gases

  • Optimized to communicate with CSI’s Facility Management Software that informs the technicians of scrubber related Issues

EMERGENCY, CATASTROPHIC RELEASE & FINAL EFFLUENT POLISHING SCRUBBERS

CSI offers abatement systems that serve as the final abatement from hazardous gas cabinets, fume hoods, reactor enclosures, and from excursions that make it past existing scrubbers.

OLYMPUS DRY SCRUBBER

The Olympus has the ability to scrub multiple complete cylinders of hazardous gas to sub IDLH or LEL. This makes it the ultimate catastrophic-release scrubber with capacity up to 2000 CFM. The Olympus is placed directly in line with facility ducting. The Olympus 1000 features 12” inlet and outlet connections that can handle 1000 CFM flow, while the Olympus 2000 has 16” inlet and outlet connections and can handle up to 2000 CFM flow.

EUROPA & TITAN DRY SCRUBBERS:

these models provide catastrophic or end-of-line protection for flows up to 700 CFM while remaining mobile for easy replacement or refill. This platform is remarkably versatile and can provide economical and highly efficient scrubbing as a point-of-use scrubber on large flow applications. It can be combined into a “battery” of canisters for increased flow rate challenges.

ZEUS MOCVD DRY ABATEMENT SYSTEM – ADVANCEDHAZARDOUS GAS SCRUBBING

The ZEUS MOCVD Dry Abatement System by Jupiter Scientific is designed specifically for high-flow MOCVD gas applications, handling hazardous gases like AsH3 and PH3 with superior efficiency. Using a custom blend of Chemisorption media, ZEUS achieves sub-TLV removal of target gases while preventing media fouling for long-lasting performance. Its sophisticated control system optimizes canister life at minimal temperatures and ensures safe, automated purge cycles, making replacement safe and compliant.

FEATURES:

  • High-Efficiency Removal: Achieves sub-TLV levels of targeted hazardous gases, with real-time monitoring and data logging.

  • Integrated Vacuum Pump: Zero load on facility exhaust, with no back pressure on process tool exhaust.

  • Advanced Safety Controls: Includes interlocks, exhaust monitoring, and automated alerts to prevent unsafe operation.

  • User-Friendly Interface: Color touch screen with adjustable alarms, fault shutdowns, and cycle purge routines.

  • Compliance-Ready Design: UN/DOT-stamped canisters, safe for transport, with Ethernet communication for remote monitoring.

  • Optimized Flow Capacity: Supports the highest flow rates in dry bed abatement, ideal for high-flow MOCVD applications.

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VGER DRY BED SCRUBBER – RELIABLE GAS ABATEMENT FOR RESEARCH APPLICATIONS

The VGER Dry Bed Scrubber by Jupiter Scientific is specifically designed for process and research tool gas abatement, efficiently handling toxic, flammable, and corrosive gases. Using custom Chemisorption and Catalytic Medias, VGER achieves sub-TLV gas removal while preventing media fouling, ensuring long-lasting performance. With automated purge cycles and advanced data logging, VGER provides safe and compliant abatement in a compact, research-sized unit that fits seamlessly into your facility.

FEATURES:

  • High-Efficiency Gas Removal: Sub-TLV abatement of hazardous gases, with continuous monitoring and data logging.

  • Environmentally Friendly Design: Eliminates the need for methane burners or contaminated water treatment.

  • PID-Controlled Vacuum System: Ensures stable pressure, extending canister life even in challenging applications.

  • Advanced Safety Monitoring: Cabinet and exhaust monitoring, with interlocks to prevent unsafe operation.

  • User-Friendly Interface: Color touch screen with real-time flow schematics, adjustable alarms, and cycle purge routines.

  • Custom Media Options: Widest selection of catalysts and adsorbents, blended in-house for precise gas abatement needs.

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