GAS STICKS & PANELS
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Outlet isolation valve
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Retrofittable to gas cabinets
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Purge gas purification
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Conforms to SEMI S2 standards
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Upholds sample validation testing standards
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Helium leak tested to 1x10-9 atm-cm3/sec
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Auto-crossover panels
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Automatic panels
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Stand-alone manual panels
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Modular manual panels
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Purge panels
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Designed for nitrogen and other self-purging gases
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Manual pigtail purge capability
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Purge gas isolation valve
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Venturi vacuum generator
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Gauge based pressure monitoring
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Assemblies rront-mounted on standoffs for easy access and manifold maintenance
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Ultra-high purity orbitally welded and VCR construction
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Ultra-high purity diaphragm valves
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Single stage tied diaphragm regulator
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Conical filter gasket
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Includes rigid pigtail with standard CGA connection
Options
Design Standards
Panel Types
Features
GAS PANELS
As a full service ultra-high purity (UHP) fabrication shop, CSI supplies SEMI S2 certified, production-ready ultra-high purity gas source systems, distribution systems and control technology. UHP gas panels provide safe, efficient distribution of process gases when system cleanliness and product purity are critical. They are designed to be compact, minimizing the space they take up in your facility.
Gas distribution VMBs are also available to provide a complete system for your high purity gas distribution needs.
GAS STICKS
A gas stick built by an ISO-certified manufacturer and thoroughly tested to industry standards is a necessary part of an effective gas delivery system. CSI provides ultra-high purity, high purity and general-purpose gas sticks. Gas stick assemblies provide the ability to distribute gas from a single panel source to multiple tool outlets.
Features
