Wet Scrubbers
GANYMEDE WET SCRUBBER – DESIGNED FOR CONTINUOUS FLOW OF WATER-SOLUBLE GASES
CSI’s Ganymede Wet Scrubber is arguably the highest performing wet scrubber on the market today. Between the abatement of water-soluble gases to below PEL levels, pH management system with on-board chemical Injection, and process tool communication system that reduces water consumption by 90% (compared to continually-running wet scrubbers), the Ganymede is the premier choice for both production and R&D fabs world-wide.
The Ganymede uses a dual-packed column abatement methodology coupled with on-board chemical injections for ultra-high efficiencies to below PEL levels. As the removal of the hazardous gases from the exhaust and the neutralization of the wastewater are both performed in the Ganymede, we can both dump directly to drain and minimize water consumption through this process.
FEATURES:
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Ultra-high efficiencies to greater than 99+%
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On-board chemical inject
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Integrated pH and temperature monitoring
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Mag drive lift station
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Tool interlocks
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Low water consumption via intelligent water monitoring
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Low cost of water through the use of gray water or RO reject
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On-board waste neutralization
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Stainless steel or poly scrubbing towers
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Communication capacity via MODBUS, BACnet and Profinet
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Optimized to communicate with CSI’s Facility Management Software that informs the technicians of scrubber-related Issues
