Wet Scrubbers
IO Thermal Wet Abatement Systems – Designed for Continuous Flow of Flammable and Water-Soluble Gases
A thermal-wet scrubber is what is typically used for abatement when applications call for a continuous flow of both flammable and water-soluble gases, or when the abatement challenge will change on a regular basis with new gases being introduced.
The issue with traditional Thermal-Wet abatement systems is the high use of methane and water to effectively abate the exhaust. Coupled with this is that many scrubbers of this design are not designed to be turned off, nor are there interlocks to account for idle process tools. This results in scrubbers continually running at this rate even though hazardous exhaust isn’t running.
In fact, a 2021 study at Georgia Tech concluded that operating their existing thermal-wet CDO cost the university $8,168.08 a month, which amounted to over $98,017 in consumable costs per year. This was calculated in part from a water flow rate of 4 GPM.
The IO is different.
With active water and power management, which includes interlocks to know when the process tool is running, the IO can be moved into a sleep mode, conserving resources and reducing costs by only running at full capacity when needed. Optional cooling water recirculation and chemical injection allows the IO to further reduce consumables while maintaining ultra-high abatement efficiencies.
Features:
Exhaust flows to 400 SLPM
3 abatement technologies in 1 System for Sub-PEL efficiencies
Minimal water loss to vaporization
Interlocks to process tools to run when needed
FM approved interlocks for pressure, temperature, FM limit, water level, and others
Sophisticated communications with real-time monitoring of system functions
Communication capacity via MODBUS, BACnet and Profinet
Optimized to communicate with CSI’s facility management software that informs the technicians of scrubber-related Issues
Ganymede Wet Scrubber – Designed for Continuous Flow of Water-Soluble Gases
CSI’s Ganymede Wet Scrubber is arguably the highest performing wet scrubber on the market today. Between the abatement of water-soluble gases to below PEL levels, pH management system with on-board chemical Injection, and process tool communication system that reduces water consumption by 90% (compared to continually-running wet scrubbers), the Ganymede is the premier choice for both production and R&D fabs world-wide.
The Ganymede uses a dual-packed column abatement methodology coupled with on-board chemical injections for ultra-high efficiencies to below PEL levels. As the removal of the hazardous gases from the exhaust and the neutralization of the wastewater are both performed in the Ganymede, we can both dump directly to drain and minimize water consumption through this process.
Features:
Ultra-high efficiencies to greater than 99+%
On-board chemical inject
Integrated pH and temperature monitoring
Mag drive lift station
Tool interlocks
Low water consumption via intelligent water monitoring
Low cost of water through the use of gray water or RO reject
On-board waste neutralization
Stainless steel or poly scrubbing towers
Communication capacity via MODBUS, BACnet and Profinet
Optimized to communicate with CSI’s Facility Management Software that informs the technicians of scrubber-related Issues