Universal Controllers

Existing high-tech fabs and laboratories have installed gas systems that can date back to the early 1990s. Due to the nature of gas delivery systems, if you adequately maintain the gas panel, the system itself will continue to operate for 10 to 15 and even 20 years. What frequently happens is that these older controllers are no longer supported by the OEM that produced them, and parts are no longer available.

Critical Systems has addressed this problem with a line of universal controllers that are suitable for retrofit to most manufacturers’ obsolete systems. In addition, CSI has also developed replacement gas panels that will upgrade your existing gas cabinet with modern componentry. This allows the user the ability to completely retrofit a gas system in place without the cost of removing the existing cabinet to install a new one.

Replacement Gas System Controllers and Gas Panels offer the Following:

  • Universal fit for many gas systems (cabinets, rack units, and VMBs) that date back well into the early ’90s

  • Communication options that allow the controllers to notify the users of warnings and alarms

  • MODBUS communications enabled

  • Updated graphics and component tags to create a common color & naming pattern throughout the Fab

  • A solution to the FMEA (Failure Mode Effect Analysis) Issue of critical equipment without a source for replacement parts

  • Considerable time savings to upgrade compared to replacing the existing gas system

  • CSI technicians to perform the work or train your techs to do this in-house

When ball-room uptime is directly linked to sub-fab performance, and the pressure is on to keep maintenance costs low, you want the best equipment possible supporting production tools to maximize uptime.

And there’s no better controller than Critical Systems’ ARIAS Systems.

ARIAS-HG Gas Systems for Hazardous Gases

Critical Systems’ ARIAS line of hazardous gas delivery systems has been designed by CSI engineers in collaboration with senior gas techs and end users with experience operating gas delivery equipment in a production environment. They have seen first-hand the effects of equipment that didn’t adequately perform under pressure. Their experiences were the genesis of the ARIAS line of gas systems which have been designed to operate flawlessly and with unprecedented quality, reliability, and performance in the industry’s most demanding environments.

ARIAS HG 4 STICK VM3 Controller

  • No proprietary control boards

  • Cabinet, rack & bulk delivery options

  • User control of colors and component tags

  • Tier 1 controllers components with the maximum years of OEM parts support

  • Instrument-based control for technician safety

  • MODBUS communications enabled

  • Optimized gas panel designs for technician safety and long component life

  • Logical gas flow paths and easy to remember controls promote user safety

  • Options for purification, multiple outlets, in-cabinet venturi vent abatement

  • CGA G13 compliance for silane gas applications

  • SEMI S2 compliant and UL listed

  • Optimized to communicate with CSI’s facility management software that informs the technicians of cabinet-related Issues

ARIAS-IG Gas Systems for Inert & Low Reactivity Gases

Critical Systems’ ARIAS-IG inert gas delivery systems were designed to provide intelligent delivery of Inert and low reactivity high purity gases, in a means that keeps total costs low. Traditionally inert and green house gases are manual systems in many fabs. But their role in the up-time of ball-room process tools is every bit as important as their hazardous gas counterparts. When a process tool runs out of gas, it shuts down, and it doesn’t matter if the gas that ran out is HBr or N2. Therefore, CSI’s ARIA-IG gas systems communicate their status to the technicians that are responsible for them. From tracking and displaying GHG usage for CAA reporting and usage control of expensive inert gases, to providing notification of remaining bottle life, the ARIAS-IG just makes sense.

  • No proprietary control boards & off-the-shelf components

  • Auto-cross, dual process out, single gas panel options, plus cabinet mount options for safety and code compliance

  • User control of colors and component tags

  • Tier 1 controllers components with the maximum years of OEM parts support

  • Intuitive open-source control system allows gas techs to configure and Install without factory support

  • Displayed weights, pressures, and time until cylinders are empty

  • MODBUS communications enabled

  • Keeps track of cylinder usage and notifies when cylinders are low in pressure

  • Equipped for EMO, excess flow switches, gas monitors, and remote shutdown

  • SEMI S2 compliant and UL listed

  • Optimized to communicate with CSI’s facility management software that informs the technicians of cabinets related Issues

ARIAS IG Controller