Gas Cabinets & Rack Units

Bringing Gas Delivery into the 21st Century

When production unit uptime is directly linked to sub-fab performance and the pressure is on to keep maintenance costs low, minimizing downtime is paramount. Critical Systems’ ARIAS line of gas delivery systems is our most efficient and safest design to date.

With both a history of reconditioning existing gas delivery equipment and employing field service technicians who have run equipment in production environments, CSI has seen firsthand the effects of equipment that doesn’t perform as expected. Our experiences were the genesis of the ARIAS line of gas delivery systems. The ARIAS line has been designed to operate flawlessly and with unprecedented quality, reliability, and performance in the industry’s most demanding environments.

CSI services the needs of production and research facilities and provides gas systems in both hastelloy and stainless steel. When combined with our OWL (Optical Workspace Link) data collection & notification facility management software, CSI provides a highly efficient and low cost-of-ownership means of process gas delivery.

  • • Single, Double and Triple Cylinder Cabinet Configurations

    • Double and Triple Cylinder Rack Unit

    • Sih4 triple cabinet with blast panel and single 8" exhaust (exceeds G13 code requirements)

  • • Inert Gas Panels - Single Process (SPO), Dual Process (DPO) & Auto-Crossover (AXO)

    • Remote Purge Panels

    • Electropolished 316L Stainless and Hastelloy C22

  • • Manual and Automatic Switchover Systems

    • Semi-Auto Systems with Remote Shutdown Capabilities

    • Fully Automated Systems with Purge Routines

    • Full Communication Capability via Modbus Protocol

  • • SEMI S2 Compliant

    • UL Labeled

    • Conforms to Uniform Building and Fire Codes

    • Upholds Sample Validation Testing Standards

    • Helium Leak Tested to 1x10-9 atm-cm3/sec

  • • New Gas Panel Design Increases Technician Safety & Gas Panel Life

    • Tier 1 Components for Long Panel Life

    • Safely Delivers Hazardous Process Gases

    • Automatic Shutdown in the event of an Alarm

    • Utilizes Automatic and Configurable Purge Sequences

    • Monitors Pressure, Weight, Exhaust and Fire Sensors

    • Intuitive Operating Interface and Control

    • System Status Displayed via the Latest HMI Technology

    • PLC is Continuously Monitoring System Instruments

    • Remote Outputs for System Status and/or Shutdown

    • Spot light Q-panel Design

    • Hi-Flow

    • Ambidextrous Panel Replacement Design

  • • Single Cabinet Dimensions: 18”W x 19”D x 76”H

    • Double Cabinet Dimensions: 24”W x 19”D x 76”H

    • Triple Cabinet Dimensions: 38”W x 19”D x 76”H

    • Exhaust Duct: 6" & 8" Diameter Collars (Gas Specific Designs)

  • • Welded 11 Ga Steel Enclosure

    • Self-Closing and Self-Latching Door

    • Self-Closing and Self-Latching Window

    • Heavy Cast Aluminum Cylinder Brackets

    • Polycarbonate Face Shield

    • Durable, Corrosion Proof, Non-Skid Floor Mat

    • UL Approved Fire Sprinkler

    • 1/4" Thick Safety Glass Window